| 1 |
Assessment of discharges for large area atmospheric pressure plasma-enhanced chemical vapor deposition (AP PE-CVD)
Engemann J, Korzec D
Thin Solid Films, 442(1-2), 36, 2003 |
| 2 |
Investigation of diamond-like carbon films synthesized by multi-jet hollow cathode rf plasma source
Fedosenko G, Korzec D, Engemann J, Lyebyedyev D, Scheer HC
Thin Solid Films, 406(1-2), 275, 2002 |
| 3 |
Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source
Nakamura M, Korzec D, Aoki T, Engemann J, Hatanaka Y
Applied Surface Science, 175, 697, 2001 |
| 4 |
Transition from polymer-like to diamond-like carbon coatings synthesized by a hybrid radiofrequency-microwave plasma source
Braca E, Kenny JM, Korzec D, Engemann J
Thin Solid Films, 394(1-2), 30, 2001 |
| 5 |
ZnSe growth by radical assisted MOCVD using hollow cathode plasma
Aoki T, Ikeda T, Korzec D, Hatanaka Y
Thin Solid Films, 368(2), 244, 2000 |
| 6 |
Surface-Wave Operation Mode of the Slot Antenna Microwave Plasma Source Slan
Werner F, Korzec D, Engemann J
Journal of Vacuum Science & Technology A, 14(6), 3065, 1996 |
| 7 |
Remote Deposition of Scratch Resistant Films by Use of Slot Antenna Microwave Plasma Source
Korzec D, Traub K, Werner F, Engemann J
Thin Solid Films, 281-282, 143, 1996 |
| 8 |
Radio-Frequency Hollow-Cathode Discharge for Large-Area Double-Sided Foil Processing
Korzec D, Schott M, Engemann J
Journal of Vacuum Science & Technology A, 13(3), 843, 1995 |
| 9 |
Large-Volume Electron-Cyclotron-Resonance Plasma Generation by Use of the Slotted Antenna Microwave Source
Engemann J, Schott M, Werner F, Korzec D
Journal of Vacuum Science & Technology A, 13(3), 875, 1995 |
| 10 |
Characterization of a Slot Antenna Microwave Plasma Source for Hydrogen Plasma Cleaning
Korzec D, Werner F, Brockhaus A, Engemann J, Schneider TP, Nemanich RJ
Journal of Vacuum Science & Technology A, 13(4), 2074, 1995 |
