검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Compositional, structural and optical properties of Si-rich a-SiC : H thin films deposited by ArF-LCVD Lopez E, Chiussi S, Kosch U, Gonzalez P, Serra J, Serra C, Leon B Applied Surface Science, 248(1-4), 113, 2005 |
| 2 |
Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing Lopez E, Chiussi S, Serra J, Gonzalez P, Serra C, Kosch U, Leon B, Fabbri F, Fornarini L, Martelli S Applied Surface Science, 234(1-4), 422, 2004 |