검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Heterogeneous recombination of atomic bromine and fluorine Kota GP, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 17(1), 282, 1999 |
| 2 |
The recombination of chlorine atoms at surfaces Kota GP, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 16(1), 270, 1998 |
| 3 |
Role of oxygen in ion-enhanced etching of poly-Si and WSix with chlorine Kota GP, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 16(4), 2215, 1998 |