검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge Macak K, Kouznetsov V, Schneider J, Helmersson U, Petrov I Journal of Vacuum Science & Technology A, 18(4), 1533, 2000 |
| No. | Article |
|---|---|
| 1 |
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge Macak K, Kouznetsov V, Schneider J, Helmersson U, Petrov I Journal of Vacuum Science & Technology A, 18(4), 1533, 2000 |