화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 End-point detection of copper super-filling in small features under a potentiostatic mode of operation
Starosvetsky D, Sezin N, Kovler M, Ein-Eli Y
Electrochimica Acta, 53(27), 7884, 2008
2 Perspective on Si negative potential dissolution mechanism
Starosvetsky D, Kovler M, Ein-Eli Y
Electrochemical and Solid State Letters, 7(8), G168, 2004
3 Structure, chemistry, and electrical performance of silicon oxide-nitride-oxide stacks on silicon
Levin I, Kovler M, Roizin Y, Vofsi M, Leapman RD, Goodman G, Kawada N, Funahashi M
Journal of the Electrochemical Society, 151(12), G833, 2004