검색결과 : 3건
No. | Article |
---|---|
1 |
End-point detection of copper super-filling in small features under a potentiostatic mode of operation Starosvetsky D, Sezin N, Kovler M, Ein-Eli Y Electrochimica Acta, 53(27), 7884, 2008 |
2 |
Perspective on Si negative potential dissolution mechanism Starosvetsky D, Kovler M, Ein-Eli Y Electrochemical and Solid State Letters, 7(8), G168, 2004 |
3 |
Structure, chemistry, and electrical performance of silicon oxide-nitride-oxide stacks on silicon Levin I, Kovler M, Roizin Y, Vofsi M, Leapman RD, Goodman G, Kawada N, Funahashi M Journal of the Electrochemical Society, 151(12), G833, 2004 |