검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reduction of the initial defect density and improvement of the reliability of Cu/low-k structures by a methylating treatment Borthakur S, Satyanarayana S, Knorr A, Kraatz M, Ho PS Journal of Vacuum Science & Technology B, 23(5), 2222, 2005 |