검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Fabrication of ultraplanar aluminum mirror array by novel encapsulation CMP for microoptics and MEMS applications Ganguly U, Krusius JP Journal of the Electrochemical Society, 151(11), H232, 2004 |
| 2 |
Novel compensation chemical metal polishing for low dishing and high global planarity for ultra-planar die applications in micro-optics and micro-electro-mechanical systems Ganguly U, Krusius JP Thin Solid Films, 460(1-2), 306, 2004 |
| 3 |
Chemically Assisted Ion-Beam Etching for Silicon-Based Microfabrication Chieh YS, Krusius JP, Chapman P Journal of the Electrochemical Society, 141(6), 1585, 1994 |
| 4 |
Accurate Determination of Shallow Doping Profiles and Interface States for Metal-Oxide-Semiconductor Structures from Measured Capacitance-Voltage Data Osse AL, Krusius JP, Weinzierl S Journal of Vacuum Science & Technology B, 12(1), 342, 1994 |