검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of poly-SiC in SF6 chemistries Kuah SH, Wood PC Journal of Vacuum Science & Technology A, 23(4), 947, 2005 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma etching of poly-SiC in SF6 chemistries Kuah SH, Wood PC Journal of Vacuum Science & Technology A, 23(4), 947, 2005 |