검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Suppression of short step bunching generated on 4H-SiC Si-face substrates with vicinal off-angle Masumoto K, Tamura K, Kudou C, Nishio J, Ito S, Kojima K, Ohno T, Okumura H Journal of Crystal Growth, 401, 673, 2014 |
| 2 |
Growth of silicon carbide epitaxial layers on 150-mm-diameter wafers using a horizontal hot-wall chemical vapor deposition Masumoto K, Kudou C, Tamura K, Nishio J, Ito S, Kojima K, Ohno T, Okumura H Journal of Crystal Growth, 381, 139, 2013 |
| 3 |
Growth of silicon carbide epitaxial layers on 150-mm-diameter wafers using a horizontal hot-wall chemical vapor deposition (vol 381, pg 139, 2013) Masumoto K, Kudou C, Tamura K, Nishio J, Ito S, Kojima K, Ohno T, Okumura H Journal of Crystal Growth, 383, 172, 2013 |