검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In-Situ Mass-Spectral and Infrared Studies of the Gas-Phase Evolution and Decomposition Pathways of Cu-II(Hfac)(2) - Application in the Development of Plasma-Assisted Chemical-Vapor-Deposition of Copper Zheng B, Braeckelmann G, Kujawski K, Lou I, Lane S, Kaloyeros AE Journal of the Electrochemical Society, 142(11), 3896, 1995 |