검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Secondary ion mass spectrometry characterization of anomalous behavior for low dose ion implanted phosphorus in silicon Penley C, Stevie FA, Griffis DP, Siebel S, Kulig L, Lee J Journal of Vacuum Science & Technology B, 28(3), 511, 2010 |
| 2 |
Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion Gu C, Pivovarov A, Garcia R, Stevie F, Griffis D, Moran J, Kulig L, Richards JF Journal of Vacuum Science & Technology B, 22(1), 350, 2004 |
| 3 |
Carrier profiling via scanning tunneling spectroscopy: Comparison with scanning capacitance microscopy Liu FY, Griffin PB, Plummer JD, Lyding JW, Moran JM, Richards JF, Kulig L Journal of Vacuum Science & Technology B, 22(1), 422, 2004 |