검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Development of Ion Sources for Ion Projection Lithography Lee Y, Gough RA, Kunkel WB, Leung KN, Perkins LT, Pickard DS, Sun L, Vujic J, Williams MD Journal of Vacuum Science & Technology B, 14(6), 3947, 1996 |
| 2 |
Multicusp Sources for Ion-Beam Lithography Applications Leung KN, Herz P, Kunkel WB, Lee Y, Perkins L, Pickard D, Sarstedt M, Weber M, Williams MD Journal of Vacuum Science & Technology B, 13(6), 2600, 1995 |