검색결과 : 1건
No. | Article |
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1 |
Optimized fabrication of silicon nanofocusing x-ray lenses using deep reactive ion etching Kurapova O, Lengeler B, Schroer CG, Kuechler M, Gessner T, van der Hart A Journal of Vacuum Science & Technology B, 25(5), 1626, 2007 |