검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of an Azimuthally Symmetrical Helicon Wave High-Density Plasma Source Tynan GR, Bailey AD, Campbell GA, Charatan R, Dechambrier A, Gibson G, Hemker DJ, Jones K, Kuthi A, Lee C, Shoji T, Wilcoxson M Journal of Vacuum Science & Technology A, 15(6), 2885, 1997 |