검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evaluation of Overlay Accuracy for the X-Ray Stepper Toxs-1 Hirano R, Higashiki T, Nomura H, Kuwabara O, Nishizaka T, Uchida N Journal of Vacuum Science & Technology B, 12(6), 3247, 1994 |
| 2 |
X-Ray Stepper Aiming at 0.2-Mu-M Synchrotron Orbital Radiation Lithography Uchida N, Kuwabara O, Ishibashi Y, Kikuiri N, Hirano R, Nishida J, Nishizaka T, Kikuchi Y, Yoshino H Journal of Vacuum Science & Technology B, 11(6), 2997, 1993 |