화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AIS1440 steel by plasma immersion ion implantation
Zeng ZM, Tian XB, Kwok TK, Tang BY, Fung MK, Chu PK
Journal of Vacuum Science & Technology A, 18(5), 2164, 2000
2 Investigation on Solid-Phase Epitaxy of Deposited SiGe Film on a Si Substrate
Qi WJ, Li BZ, Jiang GB, Gu ZG, Kwok TK, Zhang RJ, Chu PK
Thin Solid Films, 293(1-2), 310, 1997