검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Multi-scale simulation of plasma generation and film deposition in a circular type DC magnetron sputtering system Kwon UH, Choi SH, Park YH, Lee WJ Thin Solid Films, 475(1-2), 17, 2005 |
| 2 |
Three-dimensional deposition topography simulation based on new combinations of flux distribution and surface representation algorithms Kwon UH, Lee WJ Thin Solid Films, 445(1), 80, 2003 |