검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ion acceleration in non-equilibrium plasmas driven by fast drifting electron Castro G, Di Bartolo F, Gambino N, Mascali D, Romano FP, Anzalone A, Celona L, Gammino S, Di Giugno R, Lanaia D, Miracoli R, Serafino T, Tudisco S Applied Surface Science, 272, 59, 2013 |
| 2 |
Magnetically Confined Inductively-Coupled Plasma-Etching Reactor Lai C, Brunmeier B, Woods RC Journal of Vacuum Science & Technology A, 13(4), 2086, 1995 |
| 3 |
Spatial Distributions of Electron-Density and Temperature in Audio Frequency and Radio-Frequency Magnetron Glow-Discharges Fusselman SP, Yasuda HK, Javedani JB, Chiang J, Prelas MA Journal of Vacuum Science & Technology A, 12(6), 3115, 1994 |