검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Multiparameter Grating Metrology Using Optical Scatterometry Raymond CJ, Murnane MR, Prins SL, Sohail S, Naqvi H, Mcneil JR, Hosch JW Journal of Vacuum Science & Technology B, 15(2), 361, 1997 |
| 2 |
Metrology of Subwavelength Photoresist Gratings Using Optical Scatterometry Raymond CJ, Murnane MR, Naqvi SS, Mcneil JR Journal of Vacuum Science & Technology B, 13(4), 1484, 1995 |