검색결과 : 1건
No. | Article |
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1 |
In-situ As-P exchange monitoring in metal-organic vapor phase epitaxy of InGaAs/InP heterostructure by spectroscopic and kinetic ellipsometry Sudo S, Nakano Y, Sugiyama M, Shimogaki Y, Komiyama H, Tada K Thin Solid Films, 313-314, 604, 1998 |