검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of Coulomb interaction and pKa on acid diffusion in chemically amplified resists Shi XL Journal of Vacuum Science & Technology B, 17(2), 350, 1999 |
| No. | Article |
|---|---|
| 1 |
Effect of Coulomb interaction and pKa on acid diffusion in chemically amplified resists Shi XL Journal of Vacuum Science & Technology B, 17(2), 350, 1999 |