화학공학소재연구정보센터
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No. Article
1 X-ray diffraction on stacking faults in 3C-SiC epitaxial microcrystals grown on patterned Si(001) wafers
Meduna M, Kreiliger T, Mauceri M, Puglisi M, Mancarella F, La Via F, Crippa D, Miglio L, von Kanel H
Journal of Crystal Growth, 507, 70, 2019
2 3C-SiC grown on Si by using a Si1-xGex buffer layer
Zimbone M, Zielinski M, Barbagiovanni EG, Calabretta C, La Via F
Journal of Crystal Growth, 519, 1, 2019
3 Protrusions reduction in 3C-SiC thin film on Si
Zimbone M, Mauceri M, Litrico G, Barbagiovanni EG, Bongiorno C, La Via F
Journal of Crystal Growth, 498, 248, 2018
4 Carbonization and transition layer effects on 3C-SiC film residual stress
Anzalone R, Litrico G, Piluso N, Reitano R, Alberti A, Fiorenza P, Coffa S, La Via F
Journal of Crystal Growth, 473, 11, 2017
5 Sublimation growth of bulk 3C-SiC using 3C-SiC-on-Si (100) seeding layers
Schuh P, Scholer M, Wilhelm M, Syvajarvi M, Litrico G, La Via F, Mauceri M, Wellmann PJ
Journal of Crystal Growth, 478, 159, 2017
6 Wafer Cut Effect on Hetero-Epitaxial 3C-SiC Film for MEMS Application
Anzalone R, Camarda M, Auditore A, Piluso N, Severino A, La Magna A, D'Arrigo G, La Via F
Electrochemical and Solid State Letters, 15(6), H182, 2012
7 Stress fields analysis in 3C-SiC free-standing microstructures by micro-Raman spectroscopy
Piluso N, Anzalone R, Camarda M, Severino A, D'Arrigo G, La Via F
Thin Solid Films, 522, 20, 2012
8 Study of microstructure deflections and film/substrate curvature under generalized stress fields and mechanical properties
Camarda M, Anzalone R, La Magna A, La Via F
Thin Solid Films, 522, 26, 2012
9 Large area optical characterization of 3 and 4 inches 4H-SiC wafers
Canino A, Piluso N, La Via F
Thin Solid Films, 522, 30, 2012
10 Defect Influence on Heteroepitaxial 3C-SiC Young's Modulus
Anzalone R, Camarda M, Canino A, Piluso N, La Via F, D'Arrigo D
Electrochemical and Solid State Letters, 14(4), H161, 2011