검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Damage-free cleaning of Si(001) using glancing-angle ion bombardment Labanda JGC, Barnett SA, Hultman L Journal of Vacuum Science & Technology B, 16(4), 1885, 1998 |
| No. | Article |
|---|---|
| 1 |
Damage-free cleaning of Si(001) using glancing-angle ion bombardment Labanda JGC, Barnett SA, Hultman L Journal of Vacuum Science & Technology B, 16(4), 1885, 1998 |