검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Etching of silicon native oxide using ultraslow multicharged Arq+ ions Le Roux V, Machicoane G, Kerdiles S, Laffitte R, Bechu N, Vallier L, Borsoni G, Korwin-Pawlowski ML, Roman P, Wu CT, Ruzyllob J Journal of the Electrochemical Society, 151(1), G76, 2004 |
| 2 |
Ultrathin SiO2 layers formation by ultraslow single- and multicharged ions Borsoni G, Le Roux V, Laffitte R, Kerdiles S, Bechu N, Vallier L, Korwin-Pawlowski ML, Vannuffel C, Bertin F, Vergnaud C, Chabli A, Wyon C Solid-State Electronics, 46(11), 1855, 2002 |
| 3 |
Oxide nanodots and ultrathin layers fabricated on silicon using nonfocused multicharged ion beams Borsoni G, Gros-Jean M, Korwin-Pawlowski ML, Laffitte R, Le Roux V, Vallier L Journal of Vacuum Science & Technology B, 18(6), 3535, 2000 |