검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast in surface chemistry van Dorp DH, Arnauts S, Laitinen M, Sajavaara T, Meersschaut J, Conard T, Kelly JJ Applied Surface Science, 465, 596, 2019 |
| 2 |
Characterization and Electrochemical Properties of Oxygenated Amorphous Carbon (a-C) Films Palomakia T, Wester N, Johansson LS, Laitinen M, Jiang H, Arstila K, Sajavaara T, Han JG, Koskinen J, Laurila T Electrochimica Acta, 220, 137, 2016 |
| 3 |
Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3 von Gastrow G, Li S, Putkonen M, Laitinen M, Sajavaara T, Savin H Applied Surface Science, 357, 2402, 2015 |
| 4 |
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion Ylivaara OME, Liu XW, Kilpi L, Lyytinen J, Schneider D, Laitinen M, Julin J, Ali S, Sintonen S, Berdova M, Haimi E, Sajavaara T, Ronkainen H, Lipsanen H, Koskinen J, Hannula SP, Puurunen RL Thin Solid Films, 552, 124, 2014 |
| 5 |
Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition Sagari ARA, Malm J, Laitinen M, Rahkila P, Ma HQ, Putkonen M, Karppinen M, Whitlow HJ, Sajavaara T Thin Solid Films, 531, 26, 2013 |
| 6 |
Atomic layer deposition of Ru films from bis(2,5-dimethylpyrrolyl)ruthenium and oxygen Kukli K, Aarik J, Aidla A, Jogi I, Arroval T, Lu J, Sajavaara T, Laitinen M, Kiisler AA, Ritala M, Leskela M, Peck J, Natwora J, Geary J, Spohn R, Meiere S, Thompson DM Thin Solid Films, 520(7), 2756, 2012 |
| 7 |
Properties of AlN grown by plasma enhanced atomic layer deposition Bosund M, Sajavaara T, Laitinen M, Huhtio T, Putkonen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(17), 7827, 2011 |
| 8 |
Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen Kukli K, Kemell M, Puukilainen E, Aarik J, Aidla A, Sajavaara T, Laitinen M, Tallarida M, Sundqvist J, Ritala M, Leskela M Journal of the Electrochemical Society, 158(3), D158, 2011 |
| 9 |
Programmable proximity aperture lithography with MeV ion beams Puttaraksa N, Gorelick S, Sajavaara T, Laitinen M, Singkarat S, Whitlow HJ Journal of Vacuum Science & Technology B, 26(5), 1732, 2008 |