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| No. | Article |
|---|---|
| 1 |
Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: Investigation of interfacial and structural properties Lale A, Scheid E, Cristiano F, Datas L, Reig B, Launay J, Temple-Boyer P Thin Solid Films, 666, 20, 2018 |