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| No. | Article |
|---|---|
| 1 |
Benchmarking stencil reticles for electron projection lithography Wood OR, Trybula WJ, Lercel MJ, Thiel CW, Lawliss MJ, Edinger K, Stanishevsky A, Shimizu S, Kawata S Journal of Vacuum Science & Technology B, 21(6), 3072, 2003 |