검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 2 |
Conductive polyaniline : Applications in x-ray mask making Lawliss MS, Rocque JM, Angelopoulos M, Puisto DM, Henry RW Journal of Vacuum Science & Technology B, 15(6), 2224, 1997 |
| 3 |
Multiple-Pass Writing Optimization for Proximity X-Ray Mask-Making Using Electron-Beam Lithography Puisto DM, Lawliss MS, Rocque JM, Kimmel KR, Hartley JG Journal of Vacuum Science & Technology B, 14(6), 4341, 1996 |