화학공학소재연구정보센터
검색결과 : 9건
No. Article
1 Photochemical Doping and Tuning of the Work Function and Dirac Point in Graphene Using Photoacid and Photobase Generators
Baltazar J, Sojoudi H, Paniagua SA, Zhang SY, Lawson RA, Marder SR, Graham S, Tolbert LM, Henderson CL
Advanced Functional Materials, 24(32), 5147, 2014
2 High sensitivity nonchemically amplified molecular resists based on photosensitive dissolution inhibitors
Lawson RA, Tolbert LM, Henderson CL
Journal of Vacuum Science & Technology B, 28(6), C6S12, 2010
3 Understanding the relationship between true and measured resist feature critical dimension and line edge roughness using a detailed scanning electron microscopy simulator
Lawson RA, Henderson CL
Journal of Vacuum Science & Technology B, 28(6), C6H34, 2010
4 Comparison of positive tone versus negative tone resist pattern collapse bahavior*
Yeh WM, Noga DE, Lawson RA, Tolbert LM, Henderson CL
Journal of Vacuum Science & Technology B, 28(6), C6S6, 2010
5 Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups
Lawson RA, Noga DE, Younkin TR, Tolbert LM, Henderson CL
Journal of Vacuum Science & Technology B, 27(6), 2998, 2009
6 Bond contribution model for the prediction of glass transition temperature in polyphenol molecular glass resists
Lawson RA, Yeh WM, Henderson CL
Journal of Vacuum Science & Technology B, 27(6), 3004, 2009
7 Understanding the effects of photoacid distribution homogeneity and diffusivity on critical dimension control and line edge roughness in chemically amplified resists
Lee CT, Lawson RA, Henderson CL
Journal of Vacuum Science & Technology B, 26(6), 2276, 2008
8 Influence of solubility switching mechanism on resist performance in molecular glass resists
Lawson RA, Lee CT, Henderson CL, Whetsell R, Tolbert L, Yueh W
Journal of Vacuum Science & Technology B, 25(6), 2140, 2007
9 Excitation system protective limiters and their effect on volt/var control - Design, computer modeling, and field testing
Murdoch A, Delmerico RW, Venkataraman S, Lawson RA, Curran JE, Pearson WR
IEEE Transactions on Energy Conversion, 15(4), 440, 2000