검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultrathin strained Si-on-insulator and SiGe-on-insulator created using low temperature wafer bonding and metastable stop layers Taraschi G, Pitera AJ, McGill LM, Cheng ZY, Lee MJL, Langdo TA, Fitzgerald EA Journal of the Electrochemical Society, 151(1), G47, 2004 |