검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High density plasma via hole etching in SiC Cho H, Lee KP, Leerungnawarat P, Chu SNG, Ren F, Pearton SJ, Zetterling CM Journal of Vacuum Science & Technology A, 19(4), 1878, 2001 |
| 2 |
Surface morphology and removal rates for dry- and wet-etched novel resonator materials Part I. La3Ga5.5Ta0.5O14 Hays DC, Leerungnawarat P, Pearton SJ, Archibald G, Smythe RC Applied Surface Science, 165(2-3), 127, 2000 |
| 3 |
Surface morphology and removal rates for dry- and wet-etched novel resonator materials - Part II. La3Ga5.5Nb0.5O14 Hays DC, Leerungnawarat P, Pearton SJ, Archibald G, Smythe RC Applied Surface Science, 165(2-3), 135, 2000 |
| 4 |
Via-hole etching for SiC Leerungnawarat P, Hays DC, Cho H, Pearton SJ, Strong RM, Zetterling CM, Ostling M Journal of Vacuum Science & Technology B, 17(5), 2050, 1999 |