검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High transmission pellicles for extreme ultraviolet lithography reticle protection Shroff YA, Leeson M, Yan PY, Gullikson E, Salmassi F Journal of Vacuum Science & Technology B, 28(6), C6E36, 2010 |
| 2 |
Patterning of Tailored Polycarbonate Based Non-Chemically Amplified Resists Using Extreme Ultraviolet Lithography Yu AG, Liu HP, Blinco JP, Jack KS, Leeson M, Younkin TR, Whittaker AK, Blakey I Macromolecular Rapid Communications, 31(16), 1449, 2010 |