화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Comparison of the structure and electrical properties of thermal and plasma grown oxides on GaAs
Lefebvre PR, Lai L, Irene EA
Journal of Vacuum Science & Technology B, 16(3), 996, 1998
2 Study of the mechanisms of GaN film growth on GaAs surfaces by thermal and plasma nitridation
Losurdo M, Capezzuto P, Bruno G, Lefebvre PR, Irene EA
Journal of Vacuum Science & Technology B, 16(5), 2665, 1998
3 Spectroscopic immersion ellipsometry study of SiO2-Si interface roughness for electron cyclotron resonance plasma and thermally oxidized Si surfaces
Zhao C, Lefebvre PR, Irene EA
Thin Solid Films, 313-314, 286, 1998
4 An in situ and ex situ ellipsometry comparison of the interfaces of Si and GaAs resulting from thermal and plasma oxidation
Lefebvre PR, Zhao C, Irene EA
Thin Solid Films, 313-314, 454, 1998
5 Comparison of Si and GaAs/Interfaces Resulting from Thermal and Plasma Oxidation
Lefebvre PR, Irene EA
Journal of Vacuum Science & Technology B, 15(4), 1173, 1997