검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Direct-Current Sputter-Deposition of Titanium Nitride Controlled in-Situ by Soft-X-Ray Emission-Spectroscopy Legrand PB, Dauchot JP, Hecq M, Charbonnier M, Romand M Journal of Vacuum Science & Technology A, 12(4), 1551, 1994 |
| 2 |
In-Situ Monitoring by Soft-X-Ray Spectrometry of Amorphous-Carbon Plasma Deposition Legrand PB, Dauchot JP, Hecq M Thin Solid Films, 241(1-2), 260, 1994 |
| 3 |
Optical-Properties of Sputter-Deposited Aluminum Nitride Films on Silicon Legrand PB, Wautelet M, Dugnoille B, Dauchot JP, Hecq M Thin Solid Films, 248(2), 220, 1994 |