검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
UV nanoimprint materials: Surface energies, residual layers, and imprint quality Schmitt H, Frey L, Ryssel H, Rommel M, Lehrer C Journal of Vacuum Science & Technology B, 25(3), 785, 2007 |
| 2 |
Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams Lehrer C, Frey L, Petersen S, Ryssel H, Schafer M, Sulzbach T Journal of Vacuum Science & Technology B, 22(3), 1402, 2004 |
| 3 |
Limitations of focused ion beam nanomachining Lehrer C, Frey L, Petersen S, Ryssel H Journal of Vacuum Science & Technology B, 19(6), 2533, 2001 |
| 4 |
Field emitter array fabricated using focused ion and electron beam induced reaction Yavas O, Ochiai C, Takai M, Park YK, Lehrer C, Lipp S, Frey L, Ryssel H, Hosono A, Okuda S Journal of Vacuum Science & Technology B, 18(2), 976, 2000 |
| 5 |
Tetramethoxysilane as a Precursor for Focused Ion-Beam and Electron-Beam Assisted Insulator (SiOx) Deposition Lipp S, Frey L, Lehrer C, Frank B, Demm E, Pauthner S, Ryssel H Journal of Vacuum Science & Technology B, 14(6), 3920, 1996 |
| 6 |
Investigations on the Topology of Structures Milled and Etched by Focused Ion-Beams Lipp S, Frey L, Lehrer C, Frank B, Demm E, Ryssel H Journal of Vacuum Science & Technology B, 14(6), 3996, 1996 |