검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of thermal annealing on the microstructure and mechanical properties of carbon-nitrogen films deposited by radio frequency-magnetron sputtering Lacerda MM, Freire FL, Prioli R, Lepinski CM, Mariotto G Journal of Vacuum Science & Technology A, 17(5), 2811, 1999 |