검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Verification studies of thermophoretic protection for extreme ultraviolet masks Dedrick DE, Beyer EW, Rader DJ, Klebanoff LE, Leung AH Journal of Vacuum Science & Technology B, 23(1), 307, 2005 |
| 2 |
First lithographic results from the extreme ultraviolet Engineering Test Stand Chapman HN, Ray-Chaudhuri AK, Tichenor DA, Replogle WC, Stulen RH, Kubiak GD, Rockett PD, Klebanoff LE, O'Connell D, Leung AH, Jefferson KL, Wronosky JB, Taylor JS, Hale LC, Blaedel K, Spiller EA, Sommargren GE, Folta JA, Sweeney DW, Gullikson EM, Naulleau P, Goldberg KA, Bokor J, Attwood DT, Mickan U, Hanzen R, Panning E, Yan PY, Gwyn CW, Lee SH Journal of Vacuum Science & Technology B, 19(6), 2389, 2001 |