검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Spectroscopic ellipsometry characterization of high-k gate stacks with V-t shift layers Di M, Bersch E, Clark R, Consiglio S, Leusink G, Diebold AC Thin Solid Films, 519(9), 2889, 2011 |
| 2 |
Electrical properties of Ti/TiN films prepared by chemical vapor deposition and their applications in submicron structures as contact and barrier materials Hu J, Ameen M, Leusink G, Webb D, Hillman JT Thin Solid Films, 308-309, 589, 1997 |