검색결과 : 1건
No. | Article |
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1 |
Electromigration Behavior of Hot-Sputtered Al(Cu) Versus Chemical-Vapor-Deposition W Vias Filippi RG, Levine EN, Rodbell KP Journal of Vacuum Science & Technology B, 15(3), 750, 1997 |
No. | Article |
---|---|
1 |
Electromigration Behavior of Hot-Sputtered Al(Cu) Versus Chemical-Vapor-Deposition W Vias Filippi RG, Levine EN, Rodbell KP Journal of Vacuum Science & Technology B, 15(3), 750, 1997 |