검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of tungsten nitride film as barrier layer for copper metallization Ganguli S, Chen L, Levine T, Zheng B, Chang M Journal of Vacuum Science & Technology B, 18(1), 237, 2000 |
| No. | Article |
|---|---|
| 1 |
Development of tungsten nitride film as barrier layer for copper metallization Ganguli S, Chen L, Levine T, Zheng B, Chang M Journal of Vacuum Science & Technology B, 18(1), 237, 2000 |