검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching control of benzocyclobutene in CF4/O-2 and SF6/O-2 plasmas with thick photoresist and titanium masks Liao EB, Teh WH, Teoh KW, Tay AAO, Feng HH, Kumar R Thin Solid Films, 504(1-2), 252, 2006 |
| No. | Article |
|---|---|
| 1 |
Etching control of benzocyclobutene in CF4/O-2 and SF6/O-2 plasmas with thick photoresist and titanium masks Liao EB, Teh WH, Teoh KW, Tay AAO, Feng HH, Kumar R Thin Solid Films, 504(1-2), 252, 2006 |