검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Performance evaluation of cleaning solutions enhanced with tetraalkylammonium hydroxide substituents for post-CMP cleaning on poly-Si film Pan TM, Lei TF, Ko FH, Chao TS, Liaw MC, Lee YH, Lu CP Journal of the Electrochemical Society, 149(6), G336, 2002 |
| 2 |
One-step cleaning solution to replace the conventional RCA two-step cleaning recipe for pregate oxide cleaning Pan TM, Lei TF, Chao TS, Liaw MC, Ko FH, Lu CP Journal of the Electrochemical Society, 148(6), G315, 2001 |
| 3 |
Synthesis and Characterization of Polymeric Ag(I)-Telluroether and Cu(I)-Diorganyl Ditelluride Complexes - Crystal-Structures of (Ag(Mete(CH2)(3)Teme)(2))(N)(BF4)(N), ((Mu(2)-Meteteme)Cu(Mu-Cl))(N), and (Ag-2(Ncch3)(4)(Mu(2)-(P-C6H4F)Tete(P-C6H4F))(2))(BF4)(2) Liaw WF, Lai CH, Chiou SJ, Horng YC, Chou CC, Liaw MC, Lee GH, Peng SM Inorganic Chemistry, 34(14), 3755, 1995 |