검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates Liberman V, Yilmaz C, Bloomstein TM, Somu S, Echegoyen Y, Busnaina A, Cann SG, Krohn KE, Marchant MF, Rothschild M Advanced Materials, 22(38), 4298, 2010 |
| 2 |
Liquid immersion lithography: Why, how, and when? Rothschild M, Bloomstein TM, Kunz RR, Liberman V, Switkes M, Palmacci ST, Sedlacek JHC, Hardy D, Grenville A Journal of Vacuum Science & Technology B, 22(6), 2877, 2004 |
| 3 |
Prospects for photolithography at 121 nm Liberman V, Rothschild M, Murphy PG, Palmacci ST Journal of Vacuum Science & Technology B, 20(6), 2567, 2002 |
| 4 |
Arrays of field emission cathode structures with sub-300 nm gates Bernhardt AF, Contolini RJ, Jankowski AF, Liberman V, Morse JD, Musket RG, Barton R, Macaulay J, Spindt C Journal of Vacuum Science & Technology B, 18(3), 1212, 2000 |
| 5 |
Experimentation and modeling of organic photocontamination on lithographic optics Kunz RR, Liberman V, Downs DK Journal of Vacuum Science & Technology B, 18(3), 1306, 2000 |
| 6 |
157 nm: Deepest deep-ultraviolet yet Rothschild M, Bloomstein TM, Curtin JE, Downs DK, Fedynyshyn TH, Hardy DE, Kunz RR, Liberman V, Sedlacek JHC, Uttaro RS, Bates AK, Van Peski C Journal of Vacuum Science & Technology B, 17(6), 3262, 1999 |
| 7 |
Materials issues for optical components and photomasks in 157 nm lithography Liberman V, Bloomstein TM, Rothschild M, Sedlacek JHC, Uttaro RS, Bates AK, Van Peski C, Orvek K Journal of Vacuum Science & Technology B, 17(6), 3273, 1999 |
| 8 |
Vapor-Deposition Polymerization of Polyimide for Microelectronic Applications Malba V, Liberman V, Bernhardt AF Journal of Vacuum Science & Technology A, 15(3), 844, 1997 |
| 9 |
Vapor-Deposition of Polyimide - Segregation of Partially Reacted Species at the Polyimide Si(100) Interface Liberman V, Malba V, Bernhart AF Thin Solid Films, 305(1-2), 26, 1997 |
| 10 |
Sulfur Layer Formation on GaAs(100) by Thermal and Photochemical H2S Dissociation Nooney MG, Liberman V, Martin RM Journal of Vacuum Science & Technology A, 13(4), 1837, 1995 |