검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Etching of submicron holes inSiO(2), Ta2O5, and Nb2O5 Boucher R, Morgenroth W, Roth H, Meyer HG, Liguda C, Eich M Journal of Vacuum Science & Technology B, 22(2), 519, 2004 |
| No. | Article |
|---|---|
| 1 |
Etching of submicron holes inSiO(2), Ta2O5, and Nb2O5 Boucher R, Morgenroth W, Roth H, Meyer HG, Liguda C, Eich M Journal of Vacuum Science & Technology B, 22(2), 519, 2004 |