검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of deposition temperature on thermal stabilities of copper-carbon films in barrier-less Cu metallization Zhu H, Fu ZQ, Xie Q, Yue W, Wang CB, Kang JJ, Lina Z Applied Surface Science, 427, 276, 2018 |
| No. | Article |
|---|---|
| 1 |
Effect of deposition temperature on thermal stabilities of copper-carbon films in barrier-less Cu metallization Zhu H, Fu ZQ, Xie Q, Yue W, Wang CB, Kang JJ, Lina Z Applied Surface Science, 427, 276, 2018 |