검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of silicon carbon nitride films by ion beam sputtering Wu JJ, Wu CT, Liao YC, Lu TR, Chen LC, Chen KH, Hwa LG, Kuo CT, Ling KJ Thin Solid Films, 355-356, 417, 1999 |
| No. | Article |
|---|---|
| 1 |
Deposition of silicon carbon nitride films by ion beam sputtering Wu JJ, Wu CT, Liao YC, Lu TR, Chen LC, Chen KH, Hwa LG, Kuo CT, Ling KJ Thin Solid Films, 355-356, 417, 1999 |