검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development and characterization of silane antisticking layers on nickel-based stamps designed for nanoimprint lithography Keil M, Beck M, Ling TGI, Graczyk M, Montelius L, Heidari B Journal of Vacuum Science & Technology B, 23(2), 575, 2005 |