검색결과 : 1건
No. | Article |
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1 |
Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization Jeong S, Lee H, Cho H, Lee S, Kim H, Kim S, Park J, Jeong H Applied Surface Science, 256(6), 1683, 2010 |
No. | Article |
---|---|
1 |
Effect of additives for higher removal rate in lithium niobate chemical mechanical planarization Jeong S, Lee H, Cho H, Lee S, Kim H, Kim S, Park J, Jeong H Applied Surface Science, 256(6), 1683, 2010 |