검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Diode laser measurements of CFx species in a low-pressure, high-density plasma reactor Littau ME, Sowa MJ, Cecchi JL Journal of Vacuum Science & Technology A, 20(5), 1603, 2002 |
| 2 |
Fluorocarbon polymer deposition kinetics in a low-pressure, high density, inductively coupled plasma reactor Sowa MJ, Littau ME, Pohray V, Cecchi JL Journal of Vacuum Science & Technology A, 18(5), 2122, 2000 |