검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Remote plasma copper CVD with hydrogen and oxygen atoms Locke PS, Halstead JA, Reeves RR Chemical Engineering Communications, 153, 211, 1996 |
| 2 |
Hydrogen-Atom Assisted CVD of Copper at Low-Temperatures and in-Situ Gas-Phase Spectroscopy Studies Lee WW, Locke PS Thin Solid Films, 262(1-2), 39, 1995 |